상세 규격
상세 규격 표
Cat.No. Model Description Wafer
W01-261-420 L12-FOUP Process Carrier (FOUP) 12 inch


상세 규격 표
Cat.No. W01-261-420
Model L12-FOUP
Carrier Type Front Opening Unified Pod (FOUP)
Wafer Size 12 inch (300mm)
Wafer Capacity 25
Wafer Spacing 10mm (±0.5mm Positional tolerance wafer to wafer, non-cumulative)
Weight4.6 kg (Empty) / about 7.8 kg (Full Loaded)
Size Included Handler & Robotic Flangew420×d342×h338 mm
Excluded Handler & Robotic Flangew388×d342×h332 mm

* All datum established relative to kinematic coupling per SEMI

* Fist Wafer Position - 44mm nomial relative to horizontal datum plane